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A. Short, Jewell, L., Doshay, S., Church, C. P., Keiber, T., Bridges, F., CARTER, S., and Alers, G., Atomic layer deposition of zinc sulfide with Zn(TMHD)2, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 31, no. 1, p. 01A138, 2013.