| Title | Atomic layer deposition of zinc sulfide with Zn(TMHD)2 |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Short, A, Jewell, L, Doshay, S, Church, CP, Keiber, T, Bridges, F, CARTER, S, Alers, G |
| Journal | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films |
| Volume | 31 |
| Issue | 1 |
| Pagination | 01A138 |
| Date Published | 2013 |
| ISSN | 07342101 |
| DOI | 10.1116/1.4769862 |
| Short Title | J. Vac. Sci. Technol. A |
| Attachment | Size |
|---|---|
 Atomic layer deposition of zinc sulfide with Zn(TMHD)2.pdf | 1.07 MB |