Title | Structure in multilayer films of zinc sulfide and copper sulfide via atomic layer deposition |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | Short, A, Jewell, L, Bielecki, A, Keiber, T, Bridges, F, CARTER, S, Alers, G |
Journal | Journal of Vacuum Science & Technology A |
Volume | 32 |
Pagination | - |
URL | http://scitation.aip.org/content/avs/journal/jvsta/32/1/10.1116/1.4847956 |
DOI | 10.1116/1.4847956 |
Attachment | Size |
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![]() | 2.04 MB |